Analysis of surfaces, films, and multilayers by resonant laser ablation

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Date
1995
Author
Allen, T.M.
Smith, C.H.
Kelly, Peter B.
Anderson, John E.
Eiden, Gregory C.
Garrett, A.W.
Gill, Chris G.
Hemberger, P.H.
Nogar, Nicholas S.
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Abstract
In this manuscript we review briefly the history of Resonant Laser Ablation (RLA), and discuss some current ideas regarding sample preparation, laser parameters, and mechanism. We also discuss current applications including spectral analysis of trace components, depth profiling of thin films and multilayer structures, and the use of RLA with the Ion Trap Mass Spectrometer (ITMS).
Description
Conference Proceedings: Advanced Optical Methods for Ultrasensitive Detection. Conference Date: February 6-7, 1995. Location: San Jose, California.
URI
http://hdl.handle.net/10613/3150
Identifier (Other)
DOI: 10.1117/12.206451
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