Analysis of surfaces, films, and multilayers by resonant laser ablation

Abstract

In this manuscript we review briefly the history of Resonant Laser Ablation (RLA), and discuss some current ideas regarding sample preparation, laser parameters, and mechanism. We also discuss current applications including spectral analysis of trace components, depth profiling of thin films and multilayer structures, and the use of RLA with the Ion Trap Mass Spectrometer (ITMS).